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友情链接

OLS5000-SMF

阅读： 发布时间：2018-05-28

OLS5000-SMF|深圳华清仪器仪表有限公司销售OLS5000-SMF显微镜，索取OLS5000-SMF资料 ，OLS5000-SMF报价，OLS5000-SMF应用等等请来电咨询、洽谈、索取：

  29806349

Main unit

Model OLS5000-SAF OLS5000-SMF OLS5000-LAF OLS5000-EAF OLS5000-EMF
Total magnification 54x - 17,280x
Field of view 16um - 5,120um
Frame rate (Laser observation) [FPS] 3.25 - 55.6
Frame rage (Color observation) [FPS] 30
Measurement principle Optical system Reflection-type confocal laser scanning laser microscope 
Reflection-type confocal laser scanning laser-DIC microscope 
Color 
Color-DIC
Light receiving element Laser: Photomultiplier (2ch) 
Color: CMOS color camera
Height measurement Display resolution 0.5nm
Linear scale 0.78nm
Dynamic range 16 bits
Repeatability σn-1*1 *2 *5 10x : 0.1μm, 20x : 0.03μm, 50x : 0.012μm, 100x : 0.012μm
Accuracy *1 *3 *5 0.15 + L/100μm (L: Measuring length[μm])
Accuracy for stitched image *1 *3 *5 10x : 5.0+L/100μm, 20x or higher : 1.0+L/100μm (L: Stitching height[μm])
Measurement noise (Sq noise) *1 *4 *5 1nm [Typ]
Width measurement Display resolution 1nm
Repeatability 3σn-1 *1 *5 10x : 0.2μm, 20x：0.05μm, 50x : 0.04μm, 100x : 0.02μm
Accuracy *1 *3 *5 Measurement value +/- 1.5%
Accuracy for stitched image *1 *3 *5 10x : 24+0.5L μm, 20X 15+0.5L μm, 50X 9+0.5L μm, 100X 7+0.5L μm (L: Stitching length[mm])
Maximum number of measuring points in a single measurement 4096 x 4096 pixel
Maximum number of measuring points 36 Mpixel
XY stage configuration Length measurement module • NA NA • NA
Operating range 100 x 100mm Motorized 100 x 100mm Manual 300 x 300 mm Motorized 100 x 100mm Motorized 100 x 100mm Manual
Maximum sample height 100mm 40mm 37mm 210mm 150mm
Laser light source Wavelength 405nm
Maximum output 0.95 mW
Laser class Class 2 (IEC60825-1:2007, IEC60825-1:2014)
Color light source White LED
Electrical power 240 W 240 W 278 W 240 W 240 W
Mass Microscope body Approx. 31 kg Approx. 32 kg Approx. 50 kg Approx. 43 kg Approx. 44 kg
Control box Approx. 12 kg

*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±1%) specified in ISO554(1976), JIS Z-8703(1983). 
*2 For 20x or higher,when measured with MPLAPON LEXT series ives. 
*3 When measured with dedicated LEXT ive. 
*4 Typical value when measured with MPLAPON100XLEXT ive. 
*5 Guaranteed under Olympus Certificate System.

Objective specifications

Series Model Numerical Aperture(NA) Working Distance(WD)(mm)
UIS2 ive lens MPLFLN2.5x 0.08 10.7
MPLFLN5x 0.15 20
LEXT dedicated ive lens (10X) MPLFLN10xLEXT 0.3 10.4
LEXT dedicated ive lens (High performance type) MPLAPON20xLEXT 0.6 1
MPLAPON50xLEXT 0.95 0.35
MPLAPON100xLEXT 0.95 0.35
LEXT dedicated ive lens (Long working distance type) LMPLFLN20xLEXT 0.45 6.5
LMPLFLN50xLEXT 0.6 5
LMPLFLN100xLEXT 0.8 3.4
Super long working distance lens SLMPLN20x 0.25 25
SLMPLN50x 0.35 18
SLMPLN100x 0.6 7.6
Long working distance for LCD lens LCPLFLN20xLCD 0.45 8.3-7.4
LCPLFLN50xLCD 0.7 3.0-2.2
LCPLFLN100xLCD 0.85 1.2-0.9

Application software

Standard software OLS50-BSW Data acquisition app *1
Analysis app (Simple analysis) *2
Motorized stage package application OLS50-S-MSP
Extended analysis application OLS50-S-AA
Multi-file analysis application OLS50-S-MA *
Film thickness measurement application OLS50-S-FT *
Auto edge measurement application OLS50-S-ED *
Particle analysis application OLS50-S-PA *
Sphere/cylinder surface angle analysis application OLS50-S-SA *

* Available in March 2018. 
*1 Including Auto-stitching data acquisition and Multi-area data acquisition functions. 
*2 Including Profile analysis, Difference analysis, Step-height analysis, Surface analysis, Area/volume analysis, Line roughness analysis, Area roughness analysis and Histogram analysis.

Product lineup

OLS5000-SAF Setup Example
  OLS5000-SAF Setup Example

OLS5000-SAF

  • 100 mm motorized stage
  • Max. height of sample: 100 mm

OLS5000-SAF

OLS5000-SAF - Dimention

OLS5000-EAF

  • 100 mm motorized stage
  • Max. height of sample: 210 mm

OLS5000-EAF

OLS5000-EAF - Dimention

OLS5000-SMF

  • 100 mm motorized stage
  • Max. height of sample: 40 mm

OLS5000-SMF

OLS5000-SMF - Dimention

OLS5000-EMF

  • 100 mm motorized stage
  • Max. height of sample: 150 mm

OLS5000-EMF

OLS5000-EMF - Dimention

OLS5000-LAF

  • 300 mm motorized stage
  • Max. height of sample: 37 mm

OLS5000-LAF

OLS5000-LAF - Dimention

PC & Control unit

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